Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1991-04-29
1992-08-04
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156656, 156657, 1566591, 1566611, 156651, 156663, H01L 21306, B44C 122, C23F 100, C03C 1500
Patent
active
051356058
ABSTRACT:
A turning mirror in an optical waveguide structure is made by etching in the upper surface of the structure a cavity (18) that intercepts the path of light propagated by the waveguide (15, 16, 13). Preferably, the cavity is made to be asymmetric with the side (25) of the cavity remote from the waveguide sloping at typically a forty-five degree angle. The asymmetry can be introduced by using mask and etch techniques and treating the surface of the structure such that the etchant undercuts the mask on the side of the cavity remote from the waveguide to a greater extent than it undercuts the mask on the side of the cavity adjacent the waveguide.
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Blonder Greg E.
Cappuzzo Mark A.
Clark Harold R.
Scotti Ronald E.
Wong Yiu-Huen
Anderson R. B.
AT&T Bell Laboratories
Powell William A.
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