Methods for forming thermo-optic switches, routers and...

Details Methods for forming thermo-optic switches, routers and... Methods for forming thermo-optic switches, routers and...

2005-10-11

2005-10-11

Lee, John D. (Department: 2874)

Optical waveguides

Integrated optical circuit

C438S024000, C385S129000

Reexamination Certificate

active

06954561

ABSTRACT:
Thermo-optic devices including a bottom cladding layer, a patterned core material and a top cladding layer, each having a different refractive index, can be made by depositing a heater material, such as tungsten or chromium, on the outside of the bottom and/or top cladding layer. Depending on the refractive index differences between the cladding layers and the core layers, the amount of heater material can also be varied. The heater material can surround the cladding layers, can be present on the sidewalls and top only, or the sidewalls alone, to provide sufficient heat to change the refractive index of the layers and thus the path of light passing-through the device. These devices when built into the substrate can be connected to underlying devices for vertical integration, or connected to other devices and components formed on the same substrate for increased integration.

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Fischer, et al., “Integrated Optical Waveguide Switches in SOI,” Proceedings 1995 IEEE International SOI Conference, Oct. 1995, 141-142.

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