Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent
1998-02-09
2000-12-26
Meeks, Timothy
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
427 77, 427 78, 427299, 427309, 427255394, 42725518, C23C 1634
Patent
active
061655686
ABSTRACT:
The invention includes methods of treating sodalime glass surfaces for deposition of silicon nitride and methods of forming field emission display devices. In one aspect, the invention includes a method of treating a sodalime glass surface for deposition of silicon nitride comprising: a) cleaning a surface of the glass with detergent; and b) contacting the cleaned surface with a solution comprising a strong oxidant to remove non-silicon-dioxide materials from the surface and from a zone underlying and proximate the surface. In another aspect, the invention includes a method of treating a sodalime glass surface region for deposition of silicon nitride comprising: a) providing a sodalime glass surface region having a first concentration of an undesired chemical; b) contacting the sodalime glass surface region with a detergent solution; c) agitating the detergent solution across the sodalime glass surface region; d) removing the detergent solution from the surface region; e) after removing the detergent solution, contacting the sodalime glass surface region with a sulfuric acid solution; and f) removing the sulfuric acid solution from the sodalime glass surface region; wherein, after removing the sulfuric acid solution, the sodalime glass surface region comprises less than the first concentration of the undesired chemical.
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Abstract: Kato, Y., et al., "Effect of Washing Methods on AMLCD Glass Substrates Treated With BHF", pp. 33-34. (No Date Available).
Abstract: Walter, A.E., et al., "Effective Particle Removal Using an Enclosed Process Chamber for FPD Chemical Cleaning", pp. 37-39. (No Date Available).
Textbook excerpt: Chapter Two: Display Manufacturing, "Liquid Crystal Flat Panel Displays", (1993), pp. 63-66, Van Hostrand Reinhold. (No Month Available).
Meeks Timothy
Micro)n Technology, Inc.
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