Methods for fabricating three-dimensional micro structures

Details Methods for fabricating three-dimensional micro structures Methods for fabricating three-dimensional micro structures

1992-01-30

1995-02-14

Pal, Asok

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156635, 437915, H01L 2100

Patent

active

053891961

ABSTRACT:
A method for producing a three-dimensional object includes the steps of providing an interface plane within a chamber and generating a beam of radiant energy having varied levels of beam energy density. The beam is directed to selectively expose a pattern of address points on the interface plane to the beam of radiant energy for a limited duration. Conditions are established in the chamber to enable the beam to induce a micro-chemical reaction at the interface plane at a rate which serves to form a portion of the three-dimensional object. A significant feature of the invention is that the micro-chemical reaction is substantially binary with respect to the beam energy density. That is, the reaction is either substantially "on" or substantially "off."

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"Laser-Chemical Three-Dimensional Writing of Multimaterial Structures for Microelectromechanics:" Bloomstein et al.; Published in Proceedings for IEEE Micro Electro Mechanical Systems pp. 202-203; 1991.
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"Making a Model and Doing It Fast;" The New York Times, Sunday, Sep. 23, 1990; p. F9.
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"The Small Wonders of Microengineering;" Ivan Amato; Science, 26 Jul. 1991; pp. 387-388.

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