Methods for enhancing capacitors having roughened features...

Details Methods for enhancing capacitors having roughened features... Methods for enhancing capacitors having roughened features...

2006-08-09

2009-08-18

Luu, Chuong A. (Department: 2892)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S303000, C257S306000, C257S529000

Reexamination Certificate

active

07576380

ABSTRACT:
Structures and methods for making a semiconductor structure are discussed. The semiconductor structure includes a rough surface having protrusions formed from an undoped silicon film. If the semiconductor structure is a capacitor, the protrusions help to increase the capacitance of the capacitor. The semiconductor structure also includes a relatively smooth surface abutting the rough surface, wherein the relatively smooth surface is formed from a polycrystalline material.

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