Methods for discretized processing and process sequence...

Details Methods for discretized processing and process sequence... Methods for discretized processing and process sequence...

2008-02-08

2011-11-15

Picardat, Kevin M (Department: 2822)

Semiconductor device manufacturing: process

Formation of semiconductive active region on any substrate

C438S907000, C438S913000

Reexamination Certificate

active

08058154

ABSTRACT:
The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.

REFERENCES:
patent: 6767824 (2004-07-01), Nallan et al.
patent: 7247346 (2007-07-01), Sager et al.

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