Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2008-05-06
2010-06-15
Punnoose, Roy (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C382S145000, C382S148000
Reexamination Certificate
active
07738093
ABSTRACT:
Methods for detecting and classifying defects on a reticle are provided. One method includes acquiring images of the reticle at first and second conditions during inspection of the reticle. The first condition is different than the second condition. The method also includes detecting the defects on the reticle using one or more of the images acquired at the first condition. In addition, the method includes classifying an importance of the defects detected on the reticle using one or more of the images acquired at the second condition. The detecting and classifying steps are performed substantially simultaneously during the inspection.
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Alles David
Kvamme Damon
Stokowski Stan
Wihl Mark
Xiong Yalin
KLA-Tencor Corp.
Mewherter Ann Marie
Punnoose Roy
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