Computer-aided design and analysis of circuits and semiconductor – Integrated circuit design processing – Testing or evaluating
Reexamination Certificate
2008-07-16
2011-10-11
Do, Thuan (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Integrated circuit design processing
Testing or evaluating
C716S126000, C716S132000, C716S139000, C703S014000
Reexamination Certificate
active
08037446
ABSTRACT:
Methods are disclosed for defining evaluation points for use in optical proximity correction of a rectangular target geometry. A method for defining evaluation points for use in optical proximity correction of a rectangular target geometry may comprise predicting a contour of an image to be produced in an optical proximity correction simulation of a target geometry. The target geometry may comprise a plurality of line segments, each line segment of the plurality having one evaluation point defined thereon. The method may further comprise shifting at least one evaluation point to an associated point on the predicted contour of the image.
REFERENCES:
patent: 6245468 (2001-06-01), Futrell et al.
patent: 6319644 (2001-11-01), Pierrat et al.
patent: 6374396 (2002-04-01), Baggenstoss et al.
patent: 6447961 (2002-09-01), Futrell et al.
patent: 6563127 (2003-05-01), Lin et al.
patent: 6807519 (2004-10-01), Stanton
patent: 7003756 (2006-02-01), Zhang
patent: 7003757 (2006-02-01), Pierrat et al.
patent: 7082596 (2006-07-01), Lin
patent: 7096452 (2006-08-01), Alvarez-Gomariz et al.
patent: 7131101 (2006-10-01), Pierrat et al.
patent: 7245356 (2007-07-01), Hansen
patent: 7247574 (2007-07-01), Broeke et al.
patent: 7276315 (2007-10-01), Stanton et al.
patent: 7283205 (2007-10-01), Mackey et al.
patent: 2001/0023043 (2001-09-01), Futrell et al.
patent: 2002/0004714 (2002-01-01), Jones et al.
patent: 2003/0061587 (2003-03-01), Zhang et al.
patent: 2006/0248496 (2006-11-01), Sezginer et al.
patent: 2007/0006118 (2007-01-01), Pierrat et al.
patent: 2007/0277145 (2007-11-01), Scaman
Aoyagi et al., Precise Patterning Technique for Nb Junctions Using Optical Proximity Correction, IEEE Transactions on Applied Superconductivity, vol. 11, No. 1, arch 2001, pp. 381-384.
Futrell John R. C.
Russell Ezequiel Vidal
Stanton William A.
Do Thuan
Micro)n Technology, Inc.
TraskBritt
LandOfFree
Methods for defining evaluation points for optical proximity... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Methods for defining evaluation points for optical proximity..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods for defining evaluation points for optical proximity... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4291746