Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
Reexamination Certificate
2006-10-13
2008-09-23
Le, Thao X. (Department: 2892)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Including integrally formed optical element
Reexamination Certificate
active
07427525
ABSTRACT:
Various embodiments of the present invention are directed to methods for coupling semiconductor-based photonic devices to diamond. In one embodiment of the present invention, a method for coupling a photonic device with a diamond structure comprises embedding the diamond structure in a first substrate, where the first substrate comprises a first transparent material. The photonic device is formed in a semiconductor material, which is supported by a second substrate. An intermediate structure is formed by depositing a second transparent material over the photonic device. The second transparent material may have substantially the same refractive index as the first transparent material. The intermediate structure is then separated from the second substrate, and the intermediated structure is adhered to the first substrate so that the photonic device optically couples with the diamond structure.
REFERENCES:
patent: 2007/0277730 (2007-12-01), Rabeau et al.
patent: 2008/0063339 (2008-03-01), Spillane et al.
Beausoleil Raymond G.
Fattal David
Fiorentino Marco
Kamins Theodore I.
Santori Charles
Le Thao X.
Trice Kimberly
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