Coating processes – Nonuniform coating
Reexamination Certificate
2011-03-01
2011-03-01
Kornakov, Michael (Department: 1714)
Coating processes
Nonuniform coating
C427S134000, C034S079000, C034S310000, C034S351000, C034S381000, C118S317000, C118S400000, C134S002000, C134S006000, C134S007000, C134S010000
Reexamination Certificate
active
07897213
ABSTRACT:
An apparatus, system and method for preparing a surface of a substrate using a proximity head includes applying a non-Newtonian fluid between the surface of the substrate and a head surface of the proximity head. The non-Newtonian fluid defines a containment wall along one or more sides between the head surface and the surface of the substrate. The one or more sides provided with the non-Newtonian fluid define a treatment region on the substrate between the head surface and the surface of the substrate. A Newtonian fluid is applied to the surface of the substrate through the proximity head, such that the applied Newtonian fluid is substantially contained in the treatment region defined by the containment wall. The contained Newtonian fluid aids in the removal of one or more contaminants from the surface of the substrate. In one example, the non-Newtonian fluid can also be used to create ambient controlled isolated regions, which can assist in controlled processing of surfaces within the regions. In an alternate example, a second non-Newtonian fluid is applied to the treatment region instead of the Newtonian fluid. The second non-Newtonian fluid acts on one or more contaminants on the surface of the substrate substantially removing them from the surface of the substrate.
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PCT International Search Report—PCT US2008/001010 (3 pages) Dated Jun. 24, 2008.
Aubert, JM et al.; “Aqueous foam
de Larios John M.
Freer Erik M.
Korolik Mikhail
Mikhaylichenko Katrina
Ravkin Mike
Kornakov Michael
Lam Research Corporation
Martine & Penilla & Gencarella LLP
Zhao Xiao
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