Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2005-11-09
2010-06-29
Bali, Vikkram (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S141000
Reexamination Certificate
active
07747062
ABSTRACT:
Methods, defect review tools, and systems for locating a defect in a defect review process are provided. One method includes acquiring one or more images and data from an inspection tool. The one or more images illustrate an area on a specimen in which a defect to be reviewed is located. The data indicates a position and features of the defect within the area. The method also includes acquiring one or more additional images of the specimen proximate the position of the defect indicated in the data using an imaging subsystem of a defect review tool. In addition, the method includes identifying a portion of the one or more additional images that corresponds to the one or more images. The method further includes determining a position of the defect within the portion of the one or more additional images using the data.
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International Search Report and Written Opinion for PCT/US06/60701 mailed on Aug. 1, 2008.
Banerjee Saibal
Bhattacharyya Santosh
Chen Da
Fouquet Christophe
Germanenko Igor
Bali Vikkram
KLA-Tencor Technologies Corp.
Mewherter Ann Marie
Rice Elisa M
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