Semiconductor device manufacturing: process – Miscellaneous
Reexamination Certificate
2011-03-01
2011-03-01
Geyer, Scott B (Department: 2812)
Semiconductor device manufacturing: process
Miscellaneous
C414S935000
Reexamination Certificate
active
07897525
ABSTRACT:
In accordance with some embodiments described herein, a method for transferring a substrate to two or more process modules is provided, comprising loading at least one substrate into one or more mobile transverse chambers, the mobile transverse chambers being carried on a rail positioned adjacent to the two or more process modules, and wherein each mobile transverse chamber is configured to maintain a specified gas condition during conveyance of the substrate. One or more drive systems are actuated to propel at least one of the one or more mobile transverse chambers along the rail. The at least one mobile transfer chamber docks to at least one of the process modules, and the substrate is conveyed from the mobile transverse chamber to the at least one process modules.
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International Search Report and Written Opinion, PCT/US2009/069601, Aug. 30, 2010, 15 pages.
Lei Lawrence Chung-Lai
Liu Rex
Mak Alfred
Pak Samuel S.
Park Kon
Archers Inc.
Geyer Scott B
Morgan & Lewis & Bockius, LLP
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