Incremental printing of symbolic information – Light or beam marking apparatus or processes
Reexamination Certificate
2008-07-01
2008-07-01
Pham, Hai C (Department: 2861)
Incremental printing of symbolic information
Light or beam marking apparatus or processes
C219S121600
Reexamination Certificate
active
11415547
ABSTRACT:
A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.
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Cordingley James J.
Ehrmann Jonathan S.
Griffiths Joseph J.
Johnson Shepard D.
Lee Joohan
GSI Group Corporation
Knobbe Martens Olson & Bear LLP
Pham Hai C
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