4. Semiconductor device manufacturing: process
  5. Semiconductor substrate dicing
  6. By electromagnetic irradiation

GSI Group Corporation

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Absolute encoder employing concatenated, multi-bit,...

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
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Absolute encoder employing linked sub-encoders and beat track

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
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Absolute encoder employing linked sub-encoders and beat track

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
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Apparatus for controlled movement of an element

Electrical generator or motor structure – Dynamoelectric – Linear
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Controlling laser polarization

Coherent light generators – Particular beam control device – Modulation
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