Methods and systems for thermal-based laser processing a...

Details Methods and systems for thermal-based laser processing a... Methods and systems for thermal-based laser processing a...

2011-06-07

2011-06-07

Pert, Evan (Department: 2826)

Semiconductor device manufacturing: process

Making device array and selectively interconnecting

Using structure alterable to nonconductive state

C219S121600, C219S121690, C257SE21530, C257SE21596, C257SE23150

Reexamination Certificate

active

07955906

ABSTRACT:
A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.

REFERENCES:
patent: 3806829 (1974-04-01), Duston et al.
patent: 3869210 (1975-03-01), Fletcher et al.
patent: 4044222 (1977-08-01), Kestenbaum
patent: 4114018 (1978-09-01), Allmen et al.
patent: 4399345 (1983-08-01), Lapham et al.
patent: 4414059 (1983-11-01), Blum et al.
patent: 4467172 (1984-08-01), Ehrenwald et al.
patent: 4483005 (1984-11-01), Smart
patent: 4499437 (1985-02-01), Blazey
patent: 4532402 (1985-07-01), Overbeck
patent: 4602852 (1986-07-01), Moroz
patent: 4646308 (1987-02-01), Kafka et al.
patent: 4742522 (1988-05-01), Linford
patent: 4761774 (1988-08-01), Ishibashi et al.
patent: 4769523 (1988-09-01), Tanimoto et al.
patent: 4780177 (1988-10-01), Wojnarowski et al.
patent: 4826785 (1989-05-01), McClure et al.
patent: 4827325 (1989-05-01), Or-Bach et al.
patent: 4878222 (1989-10-01), Lawrence
patent: 4914663 (1990-04-01), Basu et al.
patent: 4932031 (1990-06-01), Alfano et al.
patent: 5005946 (1991-04-01), Brandstetter
patent: 5021362 (1991-06-01), Chlipala
patent: 5034951 (1991-07-01), Edelstein et al.
patent: 5042040 (1991-08-01), Harvey et al.
patent: 5059764 (1991-10-01), Baer
patent: 5175664 (1992-12-01), Diels et al.
patent: 5197074 (1993-03-01), Emmons, Jr. et al.
patent: 5201137 (1993-04-01), Theret et al.
patent: 5208437 (1993-05-01), Miyauchi et al.
patent: 5236551 (1993-08-01), Pan
patent: 5265114 (1993-11-01), Sun et al.
patent: 5268911 (1993-12-01), Young
patent: 5280491 (1994-01-01), Lai
patent: 5293025 (1994-03-01), Wang
patent: 5294567 (1994-03-01), Dorfman et al.
patent: 5300756 (1994-04-01), Cordingley
patent: 5329152 (1994-07-01), Janai et al.
patent: 5374590 (1994-12-01), Batdorf et al.
patent: 5400350 (1995-03-01), Galvanauskas
patent: 5451785 (1995-09-01), Faris
patent: 5473624 (1995-12-01), Sun
patent: 5475527 (1995-12-01), Hackel et al.
patent: 5498851 (1996-03-01), Hayashi et al.
patent: 5513194 (1996-04-01), Tamura et al.
patent: 5520679 (1996-05-01), Lin
patent: 5539764 (1996-07-01), Shields et al.
patent: 5558789 (1996-09-01), Singh
patent: 5569398 (1996-10-01), Sun et al.
patent: 5586138 (1996-12-01), Yokoyama
patent: 5592327 (1997-01-01), Gabl et al.
patent: 5627848 (1997-05-01), Fermann et al.
patent: 5653900 (1997-08-01), Clement et al.
patent: 5654998 (1997-08-01), Turcu et al.
patent: 5656186 (1997-08-01), Mourou et al.
patent: 5662822 (1997-09-01), Tada et al.
patent: 5669979 (1997-09-01), Elliott et al.
patent: 5676866 (1997-10-01), In den Bäumen et al.
patent: 5685995 (1997-11-01), Sun et al.
patent: 5689519 (1997-11-01), Fermann et al.
patent: 5694408 (1997-12-01), Bott et al.
patent: 5720894 (1998-02-01), Neev et al.
patent: 5725914 (1998-03-01), Opower
patent: 5739590 (1998-04-01), Sakamoto et al.
patent: 5742634 (1998-04-01), Rieger et al.
patent: 5745284 (1998-04-01), Goldberg et al.
patent: 5747869 (1998-05-01), Prall et al.
patent: 5751585 (1998-05-01), Cutler et al.
patent: 5759428 (1998-06-01), Balamane et al.
patent: 5786560 (1998-07-01), Tatah et al.
patent: 5790574 (1998-08-01), Rieger et al.
patent: 5811751 (1998-09-01), Leong et al.
patent: 5818630 (1998-10-01), Fermann et al.
patent: 5837962 (1998-11-01), Overbeck
patent: 5841099 (1998-11-01), Owen et al.
patent: 5847960 (1998-12-01), Cutler et al.
patent: 5848080 (1998-12-01), Dahm
patent: 5854805 (1998-12-01), Reid et al.
patent: 5864430 (1999-01-01), Dickey et al.
patent: 5880877 (1999-03-01), Fermann et al.
patent: 5923686 (1999-07-01), Fermann et al.
patent: 5925271 (1999-07-01), Pollack et al.
patent: 5940418 (1999-08-01), Shields
patent: 5953354 (1999-09-01), Staver et al.
patent: 5956354 (1999-09-01), Yan
patent: 5974060 (1999-10-01), Byren et al.
patent: 5987049 (1999-11-01), Weingarten et al.
patent: 5998759 (1999-12-01), Smart
patent: 6025256 (2000-02-01), Swenson et al.
patent: 6034975 (2000-03-01), Harter et al.
patent: 6037564 (2000-03-01), Tatah
patent: 6057180 (2000-05-01), Sun et al.
patent: 6072811 (2000-06-01), Fermann et al.
patent: 6103992 (2000-08-01), Noddin
patent: 6144118 (2000-11-01), Cahill et al.
patent: 6150630 (2000-11-01), Perry et al.
patent: 6151338 (2000-11-01), Grubb et al.
patent: 6156030 (2000-12-01), Neev
patent: 6169014 (2001-01-01), McCulloch
patent: 6172325 (2001-01-01), Baird et al.
patent: 6181728 (2001-01-01), Cordingley et al.
patent: 6184490 (2001-02-01), Schweizer
patent: 6191486 (2001-02-01), Bernstein
patent: 6208458 (2001-03-01), Galvanauskas et al.
patent: 6210401 (2001-04-01), Lai
patent: 6211485 (2001-04-01), Burgess
patent: 6239406 (2001-05-01), Onoma et al.
patent: 6252195 (2001-06-01), Mosavi et al.
patent: 6268586 (2001-07-01), Stuart et al.
patent: 6281471 (2001-08-01), Smart
patent: 6285002 (2001-09-01), Ngoi et al.
patent: 6297541 (2001-10-01), Ema et al.
patent: 6300590 (2001-10-01), Lauer et al.
patent: 6339604 (2002-01-01), Smart
patent: 6340806 (2002-01-01), Smart et al.
patent: 6341029 (2002-01-01), Fillion et al.
patent: RE37585 (2002-03-01), Mourou et al.
patent: 6380838 (2002-04-01), Fujii
patent: 6421166 (2002-07-01), Velsko et al.
patent: 6433301 (2002-08-01), Dunsky et al.
patent: 6441337 (2002-08-01), Isaji et al.
patent: 6462306 (2002-10-01), Kitai et al.
patent: 6462307 (2002-10-01), Hennig et al.
patent: 6472295 (2002-10-01), Morris et al.
patent: 6483071 (2002-11-01), Hunter et al.
patent: 6541290 (2003-04-01), Bang et al.
patent: 6541731 (2003-04-01), Mead et al.
patent: 6552301 (2003-04-01), Herman et al.
patent: 6574250 (2003-06-01), Sun et al.
patent: 6580055 (2003-06-01), Iso
patent: 6593542 (2003-07-01), Baird et al.
patent: 6621040 (2003-09-01), Perry et al.
patent: 6664498 (2003-12-01), Forsman et al.
patent: 6689985 (2004-02-01), Lipman et al.
patent: 6710289 (2004-03-01), Iso
patent: 6717101 (2004-04-01), Morris et al.
patent: 6727458 (2004-04-01), Smart
patent: 6816294 (2004-11-01), Unrath et al.
patent: 6849824 (2005-02-01), Arai
patent: 6875951 (2005-04-01), Sakamoto et al.
patent: 6879605 (2005-04-01), Kyusho et al.
patent: 6887804 (2005-05-01), Sun et al.
patent: 6901090 (2005-05-01), Ohtsuki
patent: 6947123 (2005-09-01), Ohtsuki
patent: 6951995 (2005-10-01), Couch et al.
patent: 6972268 (2005-12-01), Ehrmann et al.
patent: 6989508 (2006-01-01), Ehrmann et al.
patent: 7027155 (2006-04-01), Cordingley et al.
patent: 7050208 (2006-05-01), Overbeck
patent: 7192846 (2007-03-01), Cordingley et al.
patent: 7245412 (2007-07-01), Bruland et al.
patent: 7382389 (2008-06-01), Cordingley et al.
patent: 7394476 (2008-07-01), Cordingley et al.
patent: 7482551 (2009-01-01), Sun et al.
patent: 7666759 (2010-02-01), Couch et al.
patent: 2001/0009250 (2001-07-01), Herman et al.
patent: 2001/0022673 (2001-09-01), Sato et al.
patent: 2001/0045419 (2001-11-01), Dunsky et al.
patent: 2001/0050931 (2001-12-01), Iso
patent: 2002/0003130 (2002-01-01), Sun et al.
patent: 2002/0005396 (2002-01-01), Baird et al.
patent: 2002/0009843 (2002-01-01), Kyusho et al.
patent: 2002/0050488 (2002-05-01), Nikitin et al.
patent: 2002/0063361 (2002-05-01), Fahey
patent: 2002/0131693 (2002-09-01), Islam et al.
patent: 2003/0042230 (2003-03-01), Gross et al.
patent: 2003/0058440 (2003-03-01), Scott et al.
patent: 2003/0151053 (2003-08-01), Sun et al.
patent: 2003/0178396 (2003-09-01), Na

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