Methods and systems for processing a bevel edge of a...

Details Methods and systems for processing a bevel edge of a... Methods and systems for processing a bevel edge of a...

2007-03-20

2007-03-20

Perrin, Joseph L. (Department: 1746)

Cleaning and liquid contact with solids

Processes

For metallic, siliceous, or calcareous basework, including...

C134S034000

Reexamination Certificate

active

11292490

ABSTRACT:
A system and method for processing an edge of a substrate includes an edge roller and a first proximity head. The first proximity head being mounted on the edge roller. The first proximity head capable of forming a meniscus and including a concave portion and multiple ports opening into the concave portion. The concave portion being capable of receiving an edge of a substrate and the ports including at least one process liquid injection port, at least one vacuum port and at least one surface tension control port.

REFERENCES:
patent: 4968375 (1990-11-01), Sato et al.
patent: 6398975 (2002-06-01), Mertens et al.
patent: 6523553 (2003-02-01), Redeker et al.
patent: 6797074 (2004-09-01), Redeker et al.
patent: 2002/0125212 (2002-09-01), Mertens et al.
patent: 2004/0064911 (2004-04-01), Klupfel et al.

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