Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2005-05-10
2009-08-04
Desire, Gregory M (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C250S559450, C356S237400, C356S237500, C382S143000, C382S144000, C702S083000
Reexamination Certificate
active
07570797
ABSTRACT:
Methods and systems for generating an inspection process for an inspection system are provided. One computer implemented method includes generating inspection data for a selected defect on a specimen at different values of one or more image acquisition parameters of the inspection system. The method also includes determining which of the different values produces the best inspection data for the selected defect. In addition, the method includes selecting the different values determined to produce the best inspection data as values of the one or more image acquisition parameters to be used for the inspection process.
REFERENCES:
patent: 6611728 (2003-08-01), Morioka et al.
patent: 6744266 (2004-06-01), Dor et al.
patent: 6779583 (2004-08-01), Fulton et al.
patent: 6792366 (2004-09-01), Hosoya et al.
patent: 6792367 (2004-09-01), Hosoya et al.
patent: 6799130 (2004-09-01), Okabe et al.
patent: 6879392 (2005-04-01), Sakai et al.
patent: 6919564 (2005-07-01), Nara et al.
patent: 6928375 (2005-08-01), Ono et al.
patent: 6959251 (2005-10-01), Coldren et al.
patent: 7112791 (2006-09-01), Nozoe et al.
patent: 7330248 (2008-02-01), Sakai et al.
patent: 2001/0017878 (2001-08-01), Nozoe et al.
patent: 2003/0050761 (2003-03-01), Okabe et al.
patent: 2003/0058444 (2003-03-01), Nara et al.
patent: 2003/0195712 (2003-10-01), Ono et al.
patent: 2003/0213909 (2003-11-01), Nozoe et al.
patent: 2005/0033538 (2005-02-01), Okabe et al.
patent: 2005/0168730 (2005-08-01), Sakai et al.
patent: 2005/0195396 (2005-09-01), Ono et al.
patent: 2006/0082763 (2006-04-01), Teh et al.
patent: 2007/0288219 (2007-12-01), Zafar et al.
U.S. Appl. No. 60/618,475 (Teh et al.) entitled Computer-Implemented Methods and Systems for Classifying Defects on a Specimen filed Oct. 12, 2004.
Chen Adam Chien-Huei
Hill Stewart
Huang Tong
Huet Patrick
Plihal Martin
Desire Gregory M
KLA-Tencor Technologies Corp.
Mewherter Ann Marie
LandOfFree
Methods and systems for generating an inspection process for... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Methods and systems for generating an inspection process for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods and systems for generating an inspection process for... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4116830