Optics: measuring and testing – Surface roughness
Reexamination Certificate
2006-02-28
2006-02-28
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
Surface roughness
C356S601000, C356S401000, C356S073000
Reexamination Certificate
active
07006235
ABSTRACT:
Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including, but not limited to, overlay and flatness. In this manner, a measurement device may perform multiple optical and/or non-optical metrology and/or inspection techniques.
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pate
Brown Kyle A.
Bultman Gary
Fielden John
Levy Ady
Nikoonahad Mehrdad
Daffer McDaniel LLP
KLA-Tencor Technologies Corp.
Lauchman Layla G.
Mewherter Ann Marie
Stock, Jr. Gordon J.
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