Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2007-06-07
2011-10-18
Le, Brian (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S145000, C382S147000
Reexamination Certificate
active
08041103
ABSTRACT:
Various methods and systems for determining a position of inspection data in design data space are provided. One computer-implemented method includes determining a centroid of an alignment target formed on a wafer using an image of the alignment target acquired by imaging the wafer. The method also includes aligning the centroid to a centroid of a geometrical shape describing the alignment target. In addition, the method includes assigning a design data space position of the centroid of the alignment target as a position of the centroid of the geometrical shape in the design data space. The method further includes determining a position of inspection data acquired for the wafer in the design data space based on the design data space position of the centroid of the alignment target.
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Duffy Brian
Kulkarni Ashok
Maayah Kais
Rouse Gordon
Shifrin Eugene
KLA-Tencor Technologies Corp.
Le Brian
Mewherter Ann Marie
LandOfFree
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