Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2008-05-13
2008-05-13
Barlow, John (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
Reexamination Certificate
active
10858420
ABSTRACT:
Various methods and systems for detection of selected defects particularly in relatively noisy inspection data are provided. One method includes applying a spatial filter algorithm to raw inspection data acquired across an area on a substrate to determine a first portion of the raw inspection data that has a higher probability of being a selected type of defect than a second portion of the raw inspection data. The selected type of defect includes a non-point defect. The method also includes generating a raw two-dimensional map illustrating the first portion of the raw inspection data. In addition, the method includes searching the raw two-dimensional map for an event that has spatial characteristics that approximately match spatial characteristics of the selected type of defect. The method further includes determining if the event corresponds to a defect having the selected type.
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Chen Haiguang
Kirk Michael D.
Wu Sean
Baker & McKenzie LLP
Barlow John
Bhat Aditya S.
KLA-Tencor Technologies Corp.
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