Methods and systems for controlling the concentration of a...

Details Methods and systems for controlling the concentration of a... Methods and systems for controlling the concentration of a...

2005-09-13

2005-09-13

Evans, F. L. (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

C438S016000

Reexamination Certificate

active

06943878

ABSTRACT:
Provided are methods and systems for controlling the concentration of a component in a composition, and semiconductor processing methods and systems. One exemplary method of controlling the concentration of a component in a composition involves: providing a composition which has a liquid portion, wherein the liquid portion contains a component to be monitored; performing an absorption spectroscopy measurement on a sample of the composition; and controlling the concentration of the component in the composition based on the absorption spectroscopy measurement using a feedback control loop. The invention allows for controlling the concentration of a component in a composition, for example, a corrosion inhibitor in a chemical planarization (CMP) chemical, as well as in pre- and post-CMP storage/treatment chemicals, and can provide real time, accurate process control in a simple and robust manner.

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