Methods and control systems for controlling semiconductor...

Details Methods and control systems for controlling semiconductor... Methods and control systems for controlling semiconductor...

2008-05-20

2008-05-20

Bahta, Kidest (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S096000

Reexamination Certificate

active

07376481

ABSTRACT:
A method of controlling a semiconductor device manufacturing process for a product which is newly applied and a control system for the same process are provided. According to an embodiment on the control method, a sample process time for a product applied to the semiconductor device manufacturing process for the first time is calculated. The semiconductor device manufacturing process is performed based on the calculated sample process time. Then, a main process time is calculated by applying the stored sample process time to a main process time equation. The semiconductor device manufacturing process can be controlled on the basis of the main process time. The sample process time may be stored in an information storage table.

REFERENCES:
patent: 6484300 (2002-11-01), Kim et al.
patent: 6844262 (2005-01-01), Nguyen et al.
patent: 6875997 (2005-04-01), Park et al.
patent: 2003/0119322 (2003-06-01), Hirai et al.
patent: 2004/0203321 (2004-10-01), Tsuchiyama et al.

Affiliated with

Also associated with

Rating

Methods and control systems for controlling semiconductor... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Methods and control systems for controlling semiconductor..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods and control systems for controlling semiconductor... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2809654