Methods and apparatus for treating electroless plating baths

Details Methods and apparatus for treating electroless plating baths Methods and apparatus for treating electroless plating baths

1993-03-09

1994-07-12

Spear, Frank

Liquid purification or separation

Processes

Liquid/liquid solvent or colloidal extraction or diffusing...

210259, 210652, B01D 604

Patent

active

053286162

ABSTRACT:
Apparatus and methods for removing formate ions from electroless metal plating baths employing formaldehyde as a reducing agent and typically comprising polyvalent anions as metal chelant and/or counterion. The apparatus and methods employ anion filtration to separate polyvalent anions from monovalent formate ions and ion exchange units to remove metal and metal chelant species from formate-containing streams. Preferred aspects of this invention provide apparatus and methods for removing formate from electroless copper plating baths.

REFERENCES:
patent: 4276177 (1981-06-01), Smith
patent: 4834886 (1989-05-01), Cadotte
patent: 4985661 (1990-01-01), Cadotte
patent: 5039497 (1991-08-01), Weber et al.

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