Conveyors: power-driven – Conveyor arrangement for selecting among plural sources or... – Condition responsive control means including sensing...
Reexamination Certificate
2005-02-25
2008-08-19
Bidwell, James R (Department: 3651)
Conveyors: power-driven
Conveyor arrangement for selecting among plural sources or...
Condition responsive control means including sensing...
C198S349000, C198S349600
Reexamination Certificate
active
07413069
ABSTRACT:
In a first aspect, a first method is provided for electronic device manufacturing. The first method includes the steps of (1) receiving a request to transfer a carrier from a first substrate loading station to a second substrate loading station of an electronic device manufacturing facility including a plurality of substrate loading stations, wherein the facility further includes a plurality of carrier supports coupled to a conveyor system adapted to move the carrier within the facility; (2) assigning one of the plurality of carrier supports to transfer the carrier from the first substrate loading station to the second substrate loading station such that at least one of a time required for the transfer is reduced and balance of the conveyor system is maintained; (3) moving the carrier from the first substrate loading station; and (4) moving the carrier to the second substrate loading station. Numerous other aspects are provided.
REFERENCES:
patent: 3845286 (1974-10-01), Aronstein et al.
patent: 3952388 (1976-04-01), Hasegawa et al.
patent: 4027246 (1977-05-01), Caccoma et al.
patent: 4049123 (1977-09-01), Fegley et al.
patent: 4166527 (1979-09-01), Beezer
patent: 4852717 (1989-08-01), Ross et al.
patent: 4936734 (1990-06-01), Osada
patent: 4974166 (1990-11-01), Maney et al.
patent: 5183378 (1993-02-01), Asano et al.
patent: 5256204 (1993-10-01), Wu
patent: 5372471 (1994-12-01), Wu
patent: 5382127 (1995-01-01), Garric et al.
patent: 5388945 (1995-02-01), Garric et al.
patent: 5390785 (1995-02-01), Garric et al.
patent: 5411358 (1995-05-01), Garric et al.
patent: 5544350 (1996-08-01), Hung et al.
patent: 5562383 (1996-10-01), Iwai et al.
patent: 5570990 (1996-11-01), Bonora et al.
patent: 5612886 (1997-03-01), Weng
patent: 5668056 (1997-09-01), Wu et al.
patent: 5696689 (1997-12-01), Okumura et al.
patent: 5751581 (1998-05-01), Tau et al.
patent: 5811211 (1998-09-01), Tanaka et al.
patent: 5818716 (1998-10-01), Chin et al.
patent: 5825650 (1998-10-01), Wang
patent: 5884392 (1999-03-01), Lafond
patent: 5888042 (1999-03-01), Oda
patent: 5957648 (1999-09-01), Bachrach
patent: 5971585 (1999-10-01), Dangat et al.
patent: 5976199 (1999-11-01), Wu et al.
patent: 5980183 (1999-11-01), Fosnight
patent: 6009890 (2000-01-01), Kaneko et al.
patent: 6026561 (2000-02-01), Lafond
patent: 6048259 (2000-04-01), Asai
patent: 6050768 (2000-04-01), Iwasaki et al.
patent: 6053688 (2000-04-01), Cheng
patent: 6082948 (2000-07-01), Fishkin et al.
patent: 6128588 (2000-10-01), Chacon
patent: 6134482 (2000-10-01), Iwasaki
patent: 6183186 (2001-02-01), Howells et al.
patent: 6196001 (2001-03-01), Tannous et al.
patent: 6240335 (2001-05-01), Wehrung et al.
patent: 6256550 (2001-07-01), Wu et al.
patent: 6351686 (2002-02-01), Iwasaki et al.
patent: 6415260 (2002-07-01), Yang et al.
patent: 6431814 (2002-08-01), Christensen et al.
patent: 6439822 (2002-08-01), Kimura et al.
patent: 6463350 (2002-10-01), Fukuda et al.
patent: 6526329 (2003-02-01), Tateyama et al.
patent: 6540466 (2003-04-01), Bachrach
patent: 6579052 (2003-06-01), Bonora et al.
patent: 6587744 (2003-07-01), Stoddard et al.
patent: 6641350 (2003-11-01), Nakashima et al.
patent: 6662076 (2003-12-01), Conboy et al.
patent: 6673638 (2004-01-01), Bendik et al.
patent: 6675066 (2004-01-01), Moshgbar
patent: 6684124 (2004-01-01), Schedel et al.
patent: 6715602 (2004-04-01), Gartland
patent: 6745093 (2004-06-01), Kawano et al.
patent: 6788996 (2004-09-01), Shimizu
patent: 6839603 (2005-01-01), Karasawa
patent: 6853876 (2005-02-01), Wehrung et al.
patent: 6873963 (2005-03-01), Westbury et al.
patent: 6917844 (2005-07-01), Kawano et al.
patent: 6971500 (2005-12-01), Horn
patent: 7039495 (2006-05-01), Conboy et al.
patent: 7051870 (2006-05-01), Schoendienst et al.
patent: 7077264 (2006-07-01), Rice et al.
patent: 7156221 (2007-01-01), Rice et al.
patent: 2001/0038783 (2001-11-01), Nakashima et al.
patent: 2001/0051837 (2001-12-01), Tateyama et al.
patent: 2002/0071744 (2002-06-01), Bachrach
patent: 2002/0081181 (2002-06-01), Yokomori et al.
patent: 2002/0094588 (2002-07-01), Fan et al.
patent: 2002/0114684 (2002-08-01), Jeong et al.
patent: 2002/0116086 (2002-08-01), Huber et al.
patent: 2002/0144654 (2002-10-01), Elger et al.
patent: 2002/0155705 (2002-10-01), Shimizu
patent: 2002/0182040 (2002-12-01), Kimura et al.
patent: 2003/0108407 (2003-06-01), Ogata et al.
patent: 2003/0113190 (2003-06-01), Bachrach
patent: 2003/0202866 (2003-10-01), Weng et al.
patent: 2004/0049398 (2004-03-01), Gartland et al.
patent: 2004/0062633 (2004-04-01), Rice et al.
patent: 2004/0081538 (2004-04-01), Rice et al.
patent: 2004/0187342 (2004-09-01), Izuta
patent: 2004/0225393 (2004-11-01), Kawano et al.
patent: 2004/0262132 (2004-12-01), Pauley et al.
patent: 19715974 (1998-10-01), None
patent: 0 365 589 (1992-09-01), None
patent: 0 663 686 (1995-07-01), None
patent: 0 850 720 (1998-07-01), None
patent: 1128246 (2001-08-01), None
patent: 55-091839 (1980-07-01), None
patent: 58-028860 (1983-02-01), None
patent: 60-049623 (1985-03-01), None
patent: 63234511 (1988-09-01), None
patent: 01-181156 (1989-07-01), None
patent: 01-257549 (1989-10-01), None
patent: 02-015647 (1990-01-01), None
patent: 05-128131 (1993-05-01), None
patent: 05-290053 (1993-11-01), None
patent: 06132696 (1994-05-01), None
patent: 06-260545 (1994-09-01), None
patent: 08-249044 (1996-09-01), None
patent: 09-115817 (1997-05-01), None
patent: 10-135096 (1998-05-01), None
patent: 11-176717 (1999-07-01), None
patent: 11-296208 (1999-10-01), None
patent: 2000-012646 (2000-01-01), None
patent: 2001-332464 (2001-11-01), None
patent: 2003-007584 (2003-01-01), None
patent: WO 99/28952 (1999-06-01), None
patent: WO 2005/006408 (2005-01-01), None
Przelocki, H. et al., “DIASTEMOS-computerized system of IC manufacturing control and diagnostics”, 1990, Elektronika, vol. 31 No. 11-12, pp. 38-40, Polish Language. (Abstract only).
Lovell, A.M. et al., “Cell automation: integrating manufacturing with robotics”, Dec. 1990, Solid State Technology, vol. 33 No. 12, p. 37-9.
Prasad, K., “A generic computer simulation model to characterize photolithography manufacturing area in an IC FAB facility”, Sep. 1991, IEEE Transactions on Components, Hybrids, and Manufacturing Technology, vol. 14 No. 3, p. 483-7.
Ehteshami, B. et al., “Trade-offs in cycle time management: hot lots”, May 1992, IEEE Transactions on Semiconductor Manufacturing, vol. 5 No. 2, p. 101-6.
Lou, S. et al., “Using simulation to test the robustness of various existing production control policies”, 1991, 1991 Winter Simulation Conference Proceedings, IEEE, p. 261-9.
Berg, R. et al., “The formula: world class manufacturing for hybrid thin-film component production”, 1992, IEEE/SEMI International Semiconductor Manufacturing Science Symposium, pp. 53-60.
Naguib, H., “The implementation of total quality management in a semiconductor manufacturing operation”, 1992, IEEE/SEMI International Semiconductor Manufacturing Science Symposium, p. 63-7.
Rose, D., “Productivity enhancement”, 1992, IEEE/SEMI International Semiconductor Manufacturing Science Symposium, p. 68.
Narayanan, S. et al., “Object-oriented simulation to support operator decision making in semiconductor manufacturing”, 1992, 1992 IEEE International Conference on Systems, Man and Cybernetics, vol. 2, p. 1510-15.
Leonvich, G. A. et al., “Integrated cost and productivity learning in CMOS semiconductor manufacturing”, Jan.-Mar. 1995, IBM Journal of Research and Development, vol. 39 No. 1-2, p. 201-13.
Leonvich, G., “An approach for optimizing WIP/cycle time/output in a semiconductor fabricator”, 1994, Sixteenth IEEE/CPMT International Electronics Manufacturing Technology Symposium, ‘Low-Cost Manufacturing Technologies for Tomorrow's Global Economy’, Proceedings 1994 IEMT Symposium, vol. 1, p. 108-11.
Schomig, A.K. et al., “Performance modelling of pull manufacturing systems with batch server”, 1995, Proceedings 1995 INRIA/IEEE Symposiu
Brill Todd J.
Duffin David C.
Jessop Daniel R.
Puri Amitabh
Teferra Michael
Applied Materials Inc.
Bidwell James R
Dugan & Dugan
LandOfFree
Methods and apparatus for transferring a substrate carrier... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Methods and apparatus for transferring a substrate carrier..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods and apparatus for transferring a substrate carrier... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4005833