Methods and apparatus for transferring a substrate carrier...

Conveyors: power-driven – Conveyor arrangement for selecting among plural sources or... – Condition responsive control means including sensing...

Reexamination Certificate

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Details

C198S357000, C198S349500

Reexamination Certificate

active

07434676

ABSTRACT:
In a first aspect, a first method is provided for electronic device manufacturing. The first method includes the steps of (1) receiving a request to transfer a carrier from a first substrate loading station to a second substrate loading station of an electronic device manufacturing facility including a plurality of substrate loading stations, wherein the facility further includes a plurality of carrier supports coupled to a conveyor system adapted to move the carrier within the facility; (2) assigning one of the plurality of carrier supports to transfer the carrier from the first substrate loading station to the second substrate loading station such that at least one of a time required for the transfer is reduced and balance of the conveyor system is maintained; (3) moving the carrier from the first substrate loading station; and (4) moving the carrier to the second substrate loading station. Numerous other aspects are provided.

REFERENCES:
patent: 5957648 (1999-09-01), Bachrach
patent: 6039316 (2000-03-01), Jackson et al.
patent: 6702099 (2004-03-01), Otaguro et al.
patent: 6854583 (2005-02-01), Horn
patent: 7077264 (2006-07-01), Rice et al.
patent: 7234584 (2007-06-01), Rice et al.

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