Material or article handling – Elevator or hoist and loading or unloading means therefor – Grab
Reexamination Certificate
2011-03-29
2011-03-29
Rodríguez, Saúl J (Department: 3652)
Material or article handling
Elevator or hoist and loading or unloading means therefor
Grab
C294S002000, C700S218000, C414S941000
Reexamination Certificate
active
07914248
ABSTRACT:
In a first aspect, a first method is provided repositioning support provided by an end effector. The first method includes the steps of (1) employing the end effector to support a substrate carrier by a bottom of the substrate carrier; (2) transferring the substrate carrier from the end effector to an intermediate support location, wherein the intermediate support location supports the substrate carrier by a bottom of the substrate carrier; (3) repositioning the end effector proximate an overhead transfer flange of the substrate carrier; (4) employing the end effector to support the substrate carrier by the overhead transfer flange of the substrate carrier; and (5) transferring the substrate carrier from the intermediate support location. Numerous other aspects are provided.
REFERENCES:
patent: 4449885 (1984-05-01), Hertel et al.
patent: 4776744 (1988-10-01), Stonestreet et al.
patent: 4859137 (1989-08-01), Bonora et al.
patent: 4861222 (1989-08-01), Mirkovich
patent: 4886412 (1989-12-01), Wooding et al.
patent: 5169272 (1992-12-01), Bonora et al.
patent: 5246218 (1993-09-01), Yap et al.
patent: 5256204 (1993-10-01), Wu
patent: 5360106 (1994-11-01), Nakayama et al.
patent: 5370491 (1994-12-01), Bonora et al.
patent: 5372471 (1994-12-01), Wu
patent: 5607276 (1997-03-01), Muka et al.
patent: 5615988 (1997-04-01), Wiesler et al.
patent: 5664925 (1997-09-01), Muka et al.
patent: 5668056 (1997-09-01), Wu et al.
patent: 5674039 (1997-10-01), Walker et al.
patent: 5713711 (1998-02-01), McKenna et al.
patent: 5752796 (1998-05-01), Muka
patent: 5772386 (1998-06-01), Mages et al.
patent: 5788454 (1998-08-01), Thompson et al.
patent: 5870488 (1999-02-01), Rush et al.
patent: 5931631 (1999-08-01), Bonora et al.
patent: 5950643 (1999-09-01), Miyazaki et al.
patent: 5976199 (1999-11-01), Wu et al.
patent: 5980183 (1999-11-01), Fosnight
patent: 6014817 (2000-01-01), Thompson et al.
patent: 6042324 (2000-03-01), Aggarwal et al.
patent: 6048259 (2000-04-01), Asai
patent: 6053688 (2000-04-01), Cheng
patent: 6135168 (2000-10-01), Yang et al.
patent: 6165268 (2000-12-01), Ow et al.
patent: 6183186 (2001-02-01), Howells et al.
patent: 6249342 (2001-06-01), Cheng
patent: 6281516 (2001-08-01), Bacchi et al.
patent: 6283692 (2001-09-01), Perlov et al.
patent: 6506009 (2003-01-01), Nulman et al.
patent: 6579052 (2003-06-01), Bonora et al.
patent: 6677690 (2004-01-01), Fosnight et al.
patent: 6955517 (2005-10-01), Nulman et al.
patent: 7039499 (2006-05-01), Nasr et al.
patent: 7051870 (2006-05-01), Schoendienst et al.
patent: 7077614 (2006-07-01), Hasper et al.
patent: 7168553 (2007-01-01), Rice et al.
patent: 7230702 (2007-06-01), Rice et al.
patent: 7234584 (2007-06-01), Rice et al.
patent: 7234908 (2007-06-01), Nulman et al.
patent: 7243003 (2007-07-01), Elliott et al.
patent: 7346431 (2008-03-01), Elliott et al.
patent: 7359767 (2008-04-01), Elliott et al.
patent: 7360981 (2008-04-01), Weaver
patent: 7409263 (2008-08-01), Elliott et al.
patent: 7433756 (2008-10-01), Rice et al.
patent: 2001/0043849 (2001-11-01), Perlov et al.
patent: 2002/0090282 (2002-07-01), Bachrach
patent: 2003/0031538 (2003-02-01), Weaver
patent: 2003/0110649 (2003-06-01), Hudgens
patent: 2003/0202865 (2003-10-01), Ponnekanti et al.
patent: 2003/0202868 (2003-10-01), Bachrach
patent: 2004/0081546 (2004-04-01), Elliott et al.
patent: 2004/0191042 (2004-09-01), Chen et al.
patent: 2005/0040662 (2005-02-01), Rice et al.
patent: 2005/0135903 (2005-06-01), Rice et al.
patent: 2005/0167554 (2005-08-01), Rice et al.
patent: 2005/0240290 (2005-10-01), Stone et al.
patent: 2006/0072986 (2006-04-01), Perlov et al.
patent: 2007/0237609 (2007-10-01), Nulman et al.
patent: 2007/0258796 (2007-11-01), Englhardt et al.
patent: 2007/0274813 (2007-11-01), Elliott et al.
patent: 2008/0050217 (2008-02-01), Rice et al.
patent: 2008/0051925 (2008-02-01), Rice et al.
patent: 2008/0071417 (2008-03-01), Rice et al.
patent: 2008/0187414 (2008-08-01), Elliott et al.
patent: 2008/0187419 (2008-08-01), Rice et al.
patent: 2008/0213068 (2008-09-01), Weaver
patent: 2009/0030547 (2009-01-01), Rice et al.
patent: 0 472 536 (1994-12-01), None
patent: 0 651 429 (1995-05-01), None
patent: 0 556 193 (1995-12-01), None
patent: 0 663 686 (1997-06-01), None
patent: 0 795 892 (1997-09-01), None
patent: 04-179143 (1992-06-01), None
patent: 2000-068350 (2000-03-01), None
patent: 2002-265011 (2002-09-01), None
patent: 2005-136294 (2005-05-01), None
patent: 325777 (1998-01-01), None
patent: 494079 (2002-07-01), None
patent: 494910 (2002-07-01), None
patent: 593080 (2004-06-01), None
patent: WO 97/03001 (1997-01-01), None
patent: WO 98/46503 (1998-10-01), None
patent: WO 99/32381 (1999-07-01), None
patent: WO 00/32472 (2000-06-01), None
patent: WO 00/59004 (2000-10-01), None
patent: WO 00/67334 (2000-11-01), None
patent: WO 01/10756 (2001-02-01), None
patent: WO 03/105216 (2003-12-01), None
Elliott et al., U.S. Appl. No. 12/359,310, filed Jan. 24, 2009.
Martin, et al., “Design Criteria for 300 mm Silicon Wafer Carriers, Material Handling Systems & Tools”, 1995, Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences, pp. 107-117.
Weiss, Mitchell, “Evaluating 300-mm Fab Automation Technology Options and Selection Criteria”, Jun. 1997, Micro, vol. 15, No. 6, pp. 65-66, 68, 70, 72, 74, 76, 78-79.
No-Author, “Equipe Helps Streamline 300 mm Wafer Processing”, Dec. 1, 1997, Manufacturing Automation, vol. 7, No. 3, p. 1-5.
Kobayashi, et al., “Particle Characteristics of 300-mm Minienvironment (FOUP and LPU)”, 1999, Proceedings of 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings, pp. 39-42.
Office Action of Chinese Patent Application No. 200510113300.1 dated Jul. 18, 2008.
Second Office Action of Chinese Patent Application No. 200510113300.1 dated Jun. 5, 2009.
Search Report of Taiwan Patent Application No. 094123962 dated Aug. 16, 2008.
Office Action of U.S. Appl. No. 11/180,029 mailed Jul. 13, 2007.
Jan. 14, 2008 Response to Office Action of U.S. Appl. No. 11/180,029 mailed Jul. 13, 2007.
Notice of Allowance of U.S. Appl. No. 11/180,029 mailed Apr. 24, 2008.
Restriction Requirement of U.S. Appl. No. 11/180,029 mailed Apr. 2, 2007.
Apr. 18, 2007 Reply to Restriction Requirement of U.S. Appl. No. 11/180,029 mailed Apr. 2, 2007.
Elliott Martin R.
Rice Michael Robert
Applied Materials Inc.
Dugan & Dugan
Rodríguez Saúl J
Rudawitz Joshua I
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