Methods and apparatus for providing fluid to a semiconductor...

Details Methods and apparatus for providing fluid to a semiconductor... Methods and apparatus for providing fluid to a semiconductor...

2005-01-28

2008-09-02

Fox, John (Department: 3753)

Fluid handling

Systems

With flow control means for branched passages

C137S597000, C451S101000

Reexamination Certificate

active

07418978

ABSTRACT:
In a first aspect, a valve assembly is provided that includes a valve assembly output adapted to output at least one of DI water and a chemical. A first valve of the valve assembly includes (1) a first input adapted to receive the chemical; (2) a first output adapted to circulate the chemical to a chemical return; and (3) a second output adapted to output the chemical to the valve assembly output. The valve assembly also includes a second valve positioned downstream from the first valve. The second valve includes (1) an input adapted to receive deionized (DI) water; and (2) an output adapted to output DI water to the valve assembly output. A check valve is coupled between the second output of the first valve and the output of the second valve, and the first valve, second valve and check valve are included in a single manifold.

REFERENCES:
patent: 3572366 (1971-03-01), Wiggins
patent: 4000684 (1977-01-01), Ruffley
patent: 4505294 (1985-03-01), Walter
patent: 4627465 (1986-12-01), Kolibas et al.
patent: 5558249 (1996-09-01), Falcoff
patent: 5605179 (1997-02-01), Strong et al.
patent: 5709593 (1998-01-01), Guthrie et al.
patent: 5819783 (1998-10-01), Blatt et al.
patent: 5993647 (1999-11-01), Huang et al.
patent: 6102782 (2000-08-01), Custer et al.
patent: 6148851 (2000-11-01), Friedline et al.
patent: 6149508 (2000-11-01), Vanell et al.
patent: 6336845 (2002-01-01), Engdahl et al.
patent: 6416385 (2002-07-01), Ferri et al.
patent: 6425802 (2002-07-01), Custer et al.
patent: 6431957 (2002-08-01), Lefky
patent: 6440379 (2002-08-01), Verrill et al.
patent: 6517418 (2003-02-01), Engdahl et al.
patent: 6889709 (2005-05-01), Hanada et al.
patent: 2001/0009652 (2001-07-01), Arno
patent: 2004/0213721 (2004-10-01), Arno et al.
patent: 60139962 (1987-01-01), None
patent: 10015117 (1999-07-01), None
patent: 11130150 (2000-11-01), None
patent: 2000304485 (2002-04-01), None

Affiliated with

Also associated with

Rating

Methods and apparatus for providing fluid to a semiconductor... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Methods and apparatus for providing fluid to a semiconductor..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods and apparatus for providing fluid to a semiconductor... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3992899