Metal working – Method of mechanical manufacture – Assembling or joining
Reexamination Certificate
2007-06-26
2007-06-26
Jimenez, Marc (Department: 3726)
Metal working
Method of mechanical manufacture
Assembling or joining
C029S507000, C029S890140
Reexamination Certificate
active
10672085
ABSTRACT:
A method for configuring a gas distribution channel, the gas distribution channel being configured for introducing a plasma source gas into a plasma processing chamber of a plasma processing system is disclosed. The method includes providing a metal conduit, providing a thermo-plastic tubular structure, and disposing the thermoplastic tubular structure within the metal conduit. The method also includes applying heat and pressure to the thermo-plastic tubular structure, thereby causing the thermo-plastic tubular structure to mechanically couple with the metal conduit wherein an outer surface of the thermo-plastic tubular structure is longitudinally coupled with an inner surface of the metal conduit.
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Daugherty John
Hao Fangli
IP Strategy Group PC
Jimenez Marc
Lam Research Corporation
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