Methods and apparatus for identifying thin films on a substrate

Details Methods and apparatus for identifying thin films on a substrate Methods and apparatus for identifying thin films on a substrate

2008-08-01

2010-11-16

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Of light reflection

With diffusion

C356S448000

Reexamination Certificate

active

07835007

ABSTRACT:
The present invention provides systems, apparatus and methods for detecting a film in an electronic device disposed in an electronic device processing tool. The invention includes a mounting member adapted to couple the apparatus to a view port of the electronic device processing tool, an optical energy source disposed within the mounting member and adapted to illuminate the electronic device within the electronic device processing tool, an optical system adapted to pass wavelengths indicative of a presence of the film, and an optical detector positioned to receive optical energy reflected from the substrate and passing through the optical system adapted to detect a presence or absence of the film. Numerous other features are disclosed.

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International Search Report and Written Opinion of International Application No. PCT/US08/09277 (11732-PCT) mailed Nov. 13, 2008.
International Preliminary Report on Patentability and Written Opinion of International Application No. PCT/US08/09277 (11732-PCT) mailed Feb. 11, 2010.

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