Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2007-09-25
2007-09-25
Tran, Khoi H. (Department: 3651)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C700S229000, C700S112000, C700S114000, C700S121000, C198S810010, C198S810020, C198S810030, C414S935000
Reexamination Certificate
active
11067303
ABSTRACT:
In a first aspect, a computer program product is provided. The computer program product includes a medium readable by a computer. The computer readable medium has computer program code adapted to (1) create a band map that indicates an expected status of one or more positions along a band of a continuously moving conveyor system, each position adapted to receive a carrier support adapted to transport at least one substrate carrier around an electronic device manufacturing facility; (2) monitor status of the one or more positions included in the continuously moving conveyor system; and (3) control operation of the continuously moving conveyor system based on the status of the one or more positions. Numerous other aspects are provided.
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Brill Todd J.
Hudgens Jeffrey C.
Puri Amitabh
Teferra Michael
Applied Materials Inc.
Dugan & Dugan
Tran Khoi H.
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