Methods and apparatus for electron beam inspection of samples

Details Methods and apparatus for electron beam inspection of samples Methods and apparatus for electron beam inspection of samples

2005-09-13

2005-09-13

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S311000, C250S492100, C250S492200, C250S492300

Reexamination Certificate

active

06943350

ABSTRACT:
Methods and apparatus are providing for inspecting a test sample. An electron beam is tuned to cause secondary electron emissions upon scanning a target area. Reactive substances are introduced to etch and remove materials and impurities from the scan target. Residual components are evacuated. In one example, a laser is used to irradiate and area to assist in the removal of residual components with poor vapor pressure.

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