Methods and apparatus for determining the thickness of a...

Details Methods and apparatus for determining the thickness of a... Methods and apparatus for determining the thickness of a...

2007-10-16

2007-10-16

Patidar, Jay M (Department: 2862)

Electricity: measuring and testing

Magnetic

With means to create magnetic field to test material

C324S225000, C324S202000

Reexamination Certificate

active

11172017

ABSTRACT:
A method of determining the thickness of a conductive film is disclosed. The method employs measured voltage and current responses that have been temperature-compensated to determine the thickness of the conductive film. The temperature compensation uses a temperature compensation factor obtained from a calibration substrate different from the target substrate on which the conductive film being measured is disposed. The calibration substrate has a conductive film formed of a conductive material that is substantially similar to the conductive material of the target substrate.

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International (PCT) Search Report mailed Mar. 7, 2007 re PCT/US06/23033.
Written Opinion mailed Mar. 7, 2007 re PCT/US06/23033.

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