Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
2008-05-13
2008-05-13
Nguyen, Ha Tran (Department: 2829)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
C324S754090, C324S758010
Reexamination Certificate
active
07372250
ABSTRACT:
A sensing system includes a plurality of probes arranged in a spaced relation around a stage that is adapted to support a substrate. Each probe includes a detection portion adapted to move from a known starting position toward an edge of the substrate that is supported by the stage; detect the edge of the substrate while the substrate is supported by the stage; generate a detection signal following said detection; and stop moving toward the edge of the substrate following said detection. A controller may determine an edge position of the substrate relative to the stage based on the known starting position of each detection portion and based on the detection signal generated by each detection portion. Numerous other aspects are provided.
REFERENCES:
patent: 4628238 (1986-12-01), Smulders et al.
patent: 6034524 (2000-03-01), Barringer et al.
patent: 6075375 (2000-06-01), Burkhart et al.
patent: 6158946 (2000-12-01), Miyashita
patent: 6327034 (2001-12-01), Hoover et al.
patent: 6499367 (2002-12-01), Saeki
patent: 6624897 (2003-09-01), Little
patent: 7151981 (2006-12-01), Kurita et al.
patent: 2002/0051697 (2002-05-01), Ko et al.
patent: 2002/0109823 (2002-08-01), Binnard et al.
patent: 2006/0145711 (2006-07-01), Honma
patent: 1 067 589 (2001-01-01), None
patent: 04149917 (1992-05-01), None
patent: 06089845 (1994-03-01), None
patent: 06204321 (1994-07-01), None
patent: 08313815 (1996-11-01), None
patent: 09090308 (1997-04-01), None
patent: 09152569 (1997-06-01), None
patent: 09152569 (1997-10-01), None
patent: 2001358202 (2001-12-01), None
patent: 2002308420 (2002-10-01), None
Beer Emanuel
Brunner Matthias
Kehrberg Edgar
Kurita Shinichi
Applied Materials Inc.
Chan Emily Y
Dugan & Dugan P.C.
Nguyen Ha Tran
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