Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Electrical signal parameter measurement system
Reexamination Certificate
2005-06-14
2005-06-14
Barlow, John (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Electrical signal parameter measurement system
C702S099000, C702S130000, C702S136000, C700S121000
Reexamination Certificate
active
06907364
ABSTRACT:
Presented are methods, systems, and apparatus for deriving heat flux information and using heat flux information for a workpiece used in temperature sensitive processes.
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Mundt Randall S.
Poolla Kameshwar
OnWafer Technologies, Inc.
Vo Hien
Williams Larry
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