Coating processes – Immersion or partial immersion
Reexamination Certificate
2005-11-15
2005-11-15
Valentine, Donald R. (Department: 1742)
Coating processes
Immersion or partial immersion
C205S137000, C205S148000, C204S263000, C204S264000, C204S266000, C204S212000, C118S410000, C118S416000
Reexamination Certificate
active
06964792
ABSTRACT:
The present invention provides apparatus and methods for controlling flow dynamics of a plating fluid during a plating process. The invention achieves this fluid control through use of a diffuser membrane. Plating fluid is pumped through the membrane; the design and characteristics of the membrane provide a uniform flow pattern to the plating fluid exiting the membrane. Thus a work piece, upon which a metal or other conductive material is to be deposited, is exposed to a uniform flow of plating fluid.
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Mayer Steven T.
Patton Evan E.
Stowell R. Marshall
Varadarajan Seshasayee
Beyer Weaver & Thomas LLP.
Novellus Systems Inc.
Valentine Donald R.
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