Methods and apparatus for an integral local substrate center...

Details Methods and apparatus for an integral local substrate center... Methods and apparatus for an integral local substrate center...

2009-01-24

2011-11-22

Nguyen, Tu (Department: 2886)

Optics: measuring and testing

Position or displacement

Reexamination Certificate

active

08064070

ABSTRACT:
Systems and apparatus are provided for locating the center of a substrate. The invention includes a frame, mounted between a slit valve assembly and a transfer chamber wall in substrate processing equipment; at least one emitter, housed in the frame, and adapted to emit a signal; at least one sensor, housed in the frame, and adapted to receive the emitted signal; and a controller adapted to determine a center of a substrate based on the signal received by the sensor. Numerous other aspects are provided.

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International Preliminary Report on Patentability and Written Opinion of International Application No. PCT/US/2009/031933 (11224-PCT) mailed Aug. 5, 2010.
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