Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-09-13
2009-08-18
Shechtman, Sean P (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S099000, C700S121000, C700S217000, C700S228000, C414S935000, C414S940000
Reexamination Certificate
active
07577487
ABSTRACT:
A band to band transfer module according to the present invention may be used with a substrate carrier transport system, or other systems, to transfer substrate carriers (e.g., small lot substrate carriers) from one conveyor to another conveyor or between two points on the same conveyor. The transfers (e.g., pick and place) of the substrate carriers may be made between conveyors traveling at different speeds. Numerous other aspects and features are disclosed.
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Englhardt Eric Andrew
Hudgens Jeffrey C.
Koshti Sushant S.
Lowrance Robert B.
Rice Michael R.
Applied Materials Inc.
Dugan & Dugan
Shechtman Sean P
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