Optical waveguides – Planar optical waveguide
Reexamination Certificate
2007-07-24
2007-07-24
Font, Frank G. (Department: 2883)
Optical waveguides
Planar optical waveguide
C385S130000, C385S131000, C438S029000, C438S031000
Reexamination Certificate
active
11633335
ABSTRACT:
Formation, through etching, of structures whose minimum width is less than can be achieved by optical means alone has been achieved by inserting a layer of sandwiching material between the photoresist (or hard mask if used) and the structure. By adjustment of the relative etch rates of this layer and the structure, a uniform lateral width reduction and surface smoothing of the structure is achieved.
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Badam Ramana Murthy
Bliznetsov Vladimir
Chang Chang Kuo
Doan My The
Tsang Chi Fo
Ackerman Stephen B.
Agency For Science, Technology and Research
El-Shammaa Mary
Saile Ackerman LLC
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