Method to produce nonlinear optical microcomponents

Details Method to produce nonlinear optical microcomponents Method to produce nonlinear optical microcomponents

1993-01-08

1994-12-27

Baxter, Janet C.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

264 127, 264 25, 385122, 430967, G02B 610

Patent

active

053765079

ABSTRACT:
A method to produce nonlinear optical microcomponents is described which employs hitherto not yet used material combinations. Not only waveguide structures are produced by means of X-ray depth lithography, but also microcell structures, into which materials having nonlinear optical properties are introduced. The microstructure is produced as a positive mold part, from which there is subsequently generated, by means of electroforming, a mold insert, a negative of which is made using a polymer material. After the molding operation the microstructure is applied to a substrate, and nonlinear optical material, covered by a cover plate if needed or desired, is introduced into the microcell structure.

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