Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Patent
1993-01-07
1994-12-27
Baxter, Janet C.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
264 124, 264 25, 385122, 430967, G02B 610
Patent
active
053765060
ABSTRACT:
A method to produce nonlinear optical microcomponents is described which makes it possible to employ material combinations not yet used to date. By means of X-ray depth lithography not only waveguide structures, but also microcell structures are produced, into which subsequently material of nonlinear optical properties is placed. By means of X-ray depth lithography and micromolding techniques a mold insert with a waveguide structure is produced as a positive mold, and the waveguide structure is impressed into a polymer base material by means of the mold insert. Then the impressed waveguide structure is filled with optically linear material, and after the filling operation at least one microcell structure is produced, at least in the areas of the optically linear material, into which microcell structure optically nonlinear material is placed. The microcell structure may also be impressed by means of another mold insert.
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Bauer Hans-Dieter
Bubeck Christoph
Ehrfeld Wolfgang
Moser Herbert O.
Mullen Klaus
Baxter Janet C.
IMM, Institut fur Mikrotechnik GmbH
Lehmann H. Gibner
Lehmann K. Gibner
McPherson John A.
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