Method to prevent side lobe on seal ring

Details Method to prevent side lobe on seal ring Method to prevent side lobe on seal ring

2005-02-22

2005-02-22

Chu, John S. (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C430S322000, C430S323000, C716S030000, C716S030000

Reexamination Certificate

active

06858354

ABSTRACT:
A new method is provided for the creation of a seal ring or fuse ring over the surface of a Phase Shift Mask. A seal ring pattern is created over the surface of a phase shift mask through a layer of phase shift material and a layer of opaque material. The seal ring is surrounded by a layer of opaque material by etching the layer of opaque material.

REFERENCES:
patent: 5795682 (1998-08-01), Garza
patent: 6210841 (2001-04-01), Lin et al.
patent: 6291113 (2001-09-01), Spence
patent: 6355503 (2002-03-01), Schroeder
patent: 6413684 (2002-07-01), Stanton
patent: 6630408 (2003-10-01), Tzu et al.
patent: 20010038952 (2001-11-01), Kim et al.

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