Method to increase the speed of a scanning probe microscope

Details Method to increase the speed of a scanning probe microscope Method to increase the speed of a scanning probe microscope

1989-12-04

1990-09-04

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250306, H01J 3726

Patent

active

049547046

ABSTRACT:
In a scanning probe microscope having a probe moved by a piezoelectric 3-dimensional positioner in perpendicular X and Y directions over the surface of a sample to create a raster scan thereof and feedback controlled and sensed in a Z direction vertical to the surface to gather data about the topography of the surface, this is a method of operating the piezoelectric 3-dimensional positioner to increase the speed of gathering data about a scanning area of the surface being scanned. The method comprises the steps of, causing the positioner to traverse the surface from a first edge of the scanning area with the probe in a +X direction at a first rate of speed while feedback controlling and sensing the Z direction; causing the positioner to lift the probe above the surface a clearance distance at a second edge of the scanning area opposite the first edge in the +X direction; and, causing the positioner to return the probe to the first edge in a -X direction without feedback control thereof at a second rate of speed which is faster than the first rate of speed.

REFERENCES:
patent: 4747698 (1988-05-01), Wickramasinghe et al.
patent: 4814622 (1989-03-01), Gregory et al.
patent: 4902892 (1990-02-01), Okayama et al.

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