Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Patent
1992-03-12
1993-04-27
Seidel, Richard K.
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
445 33, 313268, 313292, H01J 188
Patent
active
052057704
ABSTRACT:
Fabrication of spacer supports for use in field emitter displays through a process which involves 1) forming a mold for the spacers in a substrate through the use of micro-saw technology, 2) filling the mold with a material that is selectively etchable with respect to the mold, 3) optionally, planarizing the excess material to the level of the mold using chemical mechanical planarization, 4) attaching the filled mold to one of the electrode plates of the field emitter display, and 5) etching away (removing) the mold, after which 6) the plate can be aligned with its complementary electrode plate, and 7) a vacuum formed.
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Cathey David A.
Doan Trung T.
Lowrey Tyler A.
Rolfson J. Brett
Knapp Jeffrey T.
Micro)n Technology, Inc.
Pappas Lia M.
Seidel Richard K.
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