Method to deposit organic grafted film on barrier layer

Details Method to deposit organic grafted film on barrier layer Method to deposit organic grafted film on barrier layer

2006-04-13

2010-10-26

Van, Luan V (Department: 1795)

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Treating substrate prior to coating

C205S210000

Reexamination Certificate

active

07820026

ABSTRACT:
Generally, the process includes depositing a barrier layer on a feature formed in a dielectric layer, decorating the barrier layer with a metal, performing a grafting process, initiating a copper layer and then filing the feature by use of a bulk copper fill process. Copper features formed according to aspects described herein have desirable adhesion properties to a barrier layer formed on a semiconductor substrate and demonstrate enhanced electromigration and stress migration results in the fabricated devices formed on the substrate.

REFERENCES:
patent: 4537851 (1985-08-01), Nonogaki et al.
patent: 5567297 (1996-10-01), Mertens et al.
patent: 5930669 (1999-07-01), Uzoh
patent: 6130156 (2000-10-01), Havemann et al.
patent: 6197181 (2001-03-01), Chen
patent: 6423200 (2002-07-01), Hymes
patent: 6432821 (2002-08-01), Dubin et al.
patent: 6797146 (2004-09-01), Morrissey et al.
patent: 7196385 (2007-03-01), Bureau et al.
patent: 7247226 (2007-07-01), Bureau et al.
patent: 7504335 (2009-03-01), Yang et al.
patent: 2002/0008036 (2002-01-01), Wang
patent: 2002/0079232 (2002-06-01), Shelnut
patent: 2004/0081900 (2004-04-01), Bureau et al.
patent: 2006/0141156 (2006-06-01), Viel et al.
patent: 0250867 (1988-07-01), None
patent: 2004 018349 (2004-03-01), None
patent: 2004 019385 (2004-03-01), None

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