Method to build a microfilter

Etching a substrate: processes – Etching to produce porous or perforated article

Reexamination Certificate

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Details

C216S083000, C216S087000, C216S094000, C134S001000, C428S446000, C264S082000, C264S344000

Reexamination Certificate

active

07081208

ABSTRACT:
Methods are provided for making microfilters by subtractive techniques which remove a component or part of a filter material to form pores in the filter material and additive techniques which deposit a filter material onto a porous underlying substrate. All the methods employ a supercritical fluid or mixture which have very high solvency properties and low viscosity and CO2is the preferred supercritical fluid.

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