Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
Reexamination Certificate
2008-01-29
2008-01-29
Barlow, John (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Dimensional determination
C702S127000
Reexamination Certificate
active
11173438
ABSTRACT:
A method and software is disclosed for evaluating characteristics, such as flatness, of a surface of a sample having an edge, comprising selecting an evaluation area having an area surface and a boundary, at least one portion of which is definable with reference to the edge, and evaluating characteristics of the area surface. Edge-specific evaluation conditions are used with edge-specific metrics to quantify parameters for said evaluation area. A system for evaluating such characteristics comprises a data collection system for generating data values for selected locations on said surface; and a data analyzing system for analyzing data values to determine such characteristics. A data interpolation system may be provided to interpolate data values collected with reference to a first coordinate system for analyzing with reference to a second coordinate system.
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Koliopoulos Chris L.
Lindley Delvin A.
Poduje Noel
Sinha Jaydeep K.
Valley John F.
Barlow John
Caven & Aghevli LLC
KLA-Tencor Technologies Corporation
Washburn Douglas N
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