Method, system, and software for evaluating characteristics...

Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination

Reexamination Certificate

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C702S127000

Reexamination Certificate

active

07324917

ABSTRACT:
A method and software is disclosed for evaluating characteristics, such as flatness, of a surface of a sample having an edge, comprising selecting an evaluation area having an area surface and a boundary, at least one portion of which is definable with reference to the edge, and evaluating characteristics of the area surface. Edge-specific evaluation conditions are used with edge-specific metrics to quantify parameters for said evaluation area. A system for evaluating such characteristics comprises a data collection system for generating data values for selected locations on said surface; and a data analyzing system for analyzing data values to determine such characteristics. A data interpolation system may be provided to interpolate data values collected with reference to a first coordinate system for analyzing with reference to a second coordinate system.

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patent: 2003/0023402 (2003-01-01), Kobayashi
patent: 2003/0045089 (2003-03-01), Wenski
patent: 2004/0185662 (2004-09-01), Fujisawa
patent: 2006/0153447 (2006-07-01), Ouchi

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