Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2007-06-05
2007-06-05
Berman, Jack (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S492210, C250S492300, C250S442110, C702S084000, C438S017000
Reexamination Certificate
active
10948385
ABSTRACT:
A method including, in one embodiment, severing a sample at least partially from a substrate by cutting the substrate with a focused ion beam (FIB), capturing the substrate sample by activating a grasping element, and separating the captured sample from the substrate. The captured sample may be separated from the substrate and transported to an electron microscope for examination.
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“Zyvex F100 Nanomanipulator S
Bray Kenneth
Ellis Matthew D.
Folaron Robert
Geisberger Aaron
Skidmore George
Berman Jack
Hashmi Zia R.
Haynes and Boone LLP
Zyvex Instruments, LLC
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