Facsimile and static presentation processing – Facsimile – Facsimile measuring – testing – or calibrating
Reexamination Certificate
2007-08-14
2011-10-18
Zimmerman, Mark K (Department: 2625)
Facsimile and static presentation processing
Facsimile
Facsimile measuring, testing, or calibrating
C358S504000, C358S001900, C358S401000, C382S162000, C700S121000
Reexamination Certificate
active
08040573
ABSTRACT:
A method of determining calibration test patterns to be utilized to calibrate a model for simulating the imaging performance of an optical imaging system. The method includes the steps of defining design rules associated with a given imaging process; defining a model equation representing the imaging performance of the optical imaging system; determining a boundary of an imaging signal space based on the design rules; selecting calibration patterns based on the boundary of the imaging signal space such that the calibration patterns are on the boundary or within the boundary of the imaging signal space; and storing the selected calibration test patterns, where the calibration test patterns are utilized to calibrate the model for simulating the imaging performance of the optical imaging system.
REFERENCES:
patent: 7404174 (2008-07-01), DeMaris et al.
patent: 2007/0140552 (2007-06-01), Fan et al.
patent: 2007/0265725 (2007-11-01), Liu et al.
Broeke Douglas Van Den
Chen Jang Fung
Shi Xuelong
ASML Masktools B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Vo Quang N
Zimmerman Mark K
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