Data processing: structural design – modeling – simulation – and em – Simulating nonelectrical device or system
Reexamination Certificate
2007-11-08
2011-11-01
Rodriguez, Paul (Department: 2123)
Data processing: structural design, modeling, simulation, and em
Simulating nonelectrical device or system
Reexamination Certificate
active
08050898
ABSTRACT:
A method of generating a model for simulating the imaging performance of an optical imaging system. The method includes the steps of defining the optical imaging system and a process to be utilized by the optical imaging system; defining a first model representing the imaging performance of the optical imaging system and the process, and calibrating the model, where the first model generates values corresponding to a latent image slope. The method further includes the step of defining a second model for estimating a line width roughness of a feature to be imaged, where the second model utilizes the latent image slope values to estimate the line width roughness.
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ASML Masktools B.V.
Guill Russ
Pillsbury Winthrop Shaw & Pittman LLP
Rodriguez Paul
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